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센서 기능성 박막 / PLD 법에 의한 고집적 DRAM 용 PLZT 박막의 레이저 에너지 밀도에 따른 특성

마석범, 장낙원, 백동수, 최형욱, 박창엽

Laser Energy Density Dependence Characteristics of PLZT Thin Films prepared by a PLD for Memory Device

Suk Bum Ma, Nak Won Jang, Dong Soo Paek, Hyung Wook Choi, Chang Yub Park
J Electr Electron Mater 2000;13(1):60-65.
Published online: January 1, 2000
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Laser Energy Density Dependence Characteristics of PLZT Thin Films prepared by a PLD for Memory Device
J Electr Electron Mater. 2000;13(1):60-65.   Published online January 1, 2000
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Laser Energy Density Dependence Characteristics of PLZT Thin Films prepared by a PLD for Memory Device
J Electr Electron Mater. 2000;13(1):60-65.   Published online January 1, 2000
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