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Barrier metal
WHERE t1.sid in(parameter_dbtbl_keyword '%Barrier metal%') and t1.xml_status <> 99
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2003 (2)
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Sang Yong Kim (2)
Eui Goo Chang (1)
Nam Hoon Kim (1)
In Pyo Kim (1)
Woo Sun Lee (1)
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Nam Hoon Kim (1)
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Woo Sun Lee (1)
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Yong Jin Seo (1)
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"Barrier metal"
Investigation on DHF Application at Metal CMP Cleaning Process
Sang Yong Kim, Nam Hoon Kim, In Pyo Kim, Eui Goo Chang
J Electr Electron Mater
2003;16(7):569-572.
Published online July 1, 2003
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SIH4 Soak Effects in the W plug CVD Process
Woo Sun Lee, Yong Jin Seo, Sang Yong Kim, Jin Seung Park
J Electr Electron Mater
2003;16(1):1-4.
Published online January 1, 2003
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