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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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"Friction force"

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"Friction force"

A Study on Tribological Properties of Diamond-Like Carbon Thin Film for the Application to Solid Lubricant of MEMS Devices
J Electr Electron Mater 2006;19(11):1010-1013.   Published online November 1, 2006
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An Analysis of Tribological Properties of Metal Interlayered DLC Films Prepared by PECVD Method
J Electr Electron Mater 2006;19(7):631-635.   Published online July 1, 2006
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A Study on the Characteristics of Stick-slip Friction in CMP
J Electr Electron Mater 2005;18(4):313-320.   Published online April 1, 2005
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Characteristics of Friction Affecting CMP Results
J Electr Electron Mater 2004;17(10):1041-1048.   Published online October 1, 2004
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Effect of Abrasive Particles on Frictional Force and Abrasion in Chemical Mechanical Polishing(CMP)
J Electr Electron Mater 2004;17(10):1049-1055.   Published online October 1, 2004
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