Renewable energy harvesting technologies, which convert ambient resources such as wind into electrical energy, have attracted significant attention as sustainable power sources for self-powered systems. However, the long-term applicability of wind energy harvesters in remote or extreme environments has not yet been fully discussed, particularly in terms of structural robustness and environmental adaptability. In this study, we designed a double-clamped flutter-type triboelectric generator (DFTEG) for efficient wind energy harvesting and evaluated its output performance under various simulated outdoor conditions. The DFTEG features a modular acrylic frame with a magnet-based assembly for easy maintenance and film replacement, utilizing PTFE films and aluminum electrodes to maximize the charge density difference according to the triboelectric series. Structural optimization revealed that a single-film configuration with a length of 110 mm produced the most stable flutter vibration and a large effective contact area, achieving a maximum open-circuit voltage of 42.28 V and a short-circuit current of 2.89 μA. Furthermore, performance evaluations under various environmental variables, including relative humidity, temperature, and sand particles interference, confirmed consistent electrical output across diverse environmental conditions. These results demonstrate the potential of the proposed DFTEG as an environmentadaptive independent power source capable of stable operation under complex environmental factors.
This study proposes an optimization strategy for the over-current protection (OCP) parameters of a lithium iron phosphate (LiFePO₄, LFP) battery system used in electric golf carts operating under high motor-load conditions. Real-world hillclimbing tests were conducted under four clearly defined payload/passenger conditions to analyze the transient discharge-current pro-file, voltage sag, and cell-temperature response. The maximum discharge current reached -238.2 A under the 200 kg cargopayload and one-passenger condition, and the current interval exceeding 150 A lasted up to 27 s. The maximum instantaneous power was 11.05 kW. Thermal analysis showed that the cell-temperature rise was within 2°C and the maximum measured cell temperature was 22.3°C. Linear regression of voltage and current yielded R² = 0.9368 and dV/dI = 0.0126 Ω, which was used as the DC internalresistance estimate. Based on these quantitative results and the cell specification limit of 300 A continuous discharge, the OCP threshold was reviewed from 250 A to 280 A to improve driving continuity while remaining below the allowable continuous-discharge current. EIS-based SOH estimation and the AI-BMS variable protection logic are presented as an extension framework for reflecting temperature and aging effects in future OCP-setting decisions.
Silicon carbide (SiC) MOSFETs provide superior performance compared to traditional silicon devices under hightemperature and high-power conditions, making them particularly valuable for power electronics applications requiring highfrequency switching and high-energy efficiency. As the electric vehicle (EV) market expands, these devices are commonly packaged into six-pack modules, which can show their different electrical characteristics between the bare-die device and the package due to packaging that improves heat dissipation and other properties. This study uses bare-die SiC MOSFETs to explore their intrinsic characteristics and evaluate their performance in a half-bridge configuration. A half-bridge circuit was constructed, and performance was assessed by varying driving frequencies (10 kHz and 50 kHz) and adjusting the duty cycle between 20% and 80%. Analysis revealed that, at a fixed switching frequency, the average output voltage and average output current are proportional to the duty cycle.
The increasing global demand for renewable energy has accelerated the deployment of offshore wind farms, thereby highlighting the need for advanced development and performance assessment techniques for dynamic submarine cables used in floating offshore wind systems. These cables are continuously subjected to combined thermal, electrical, and mechanical stresses, with mechanical loading playing a particularly dominant role. As a result, dynamic submarine cables exhibit degradation behaviors that differ significantly from those of conventional fixed submarine cables. This paper presents the design and implementation of a comprehensive evaluation system capable of applying combined thermal, electrical, and mechanical stresses to dynamic submarine cables. The system was validated using a 66 kV wet type submarine cable through commissioning tests and insulation performance measurements. Electrical stress of 72 kV, thermal stress exceeding 95°C, and mechanical stress corresponding to a bending radius of 20 times the cable diameter over 20 cycles were applied to verify system reliability. The subsequent insulation assessments quantitatively confirmed performance variations induced by the combined stresses. The results demonstrate that the proposed platform is the first system capable of simultaneously applying thermal, electrical, and mechanical stresses to dynamic submarine cables, and its operational performance has been successfully validated. This platform enables realistic reliability evaluation of dynamic cables used in floating offshore wind farms and is expected to improve the overall operational reliability of offshore wind power systems.
The quench behavior of wires for superconducting fault current limiters at DC faults was simulated, with a focus on the effect of capacitor discharge on the quench. The behavior was also expressed in mathematical forms to facilitate a better understanding of the simulation results and for rough analytical estimations of the wire length suitable for the circuit voltage and capacitance. The quench resistance development behavior for various wire lengths and circuit capacitances was simulated using the model developed in the previous work. The quench behavior was expressed in mathematical forms, reflecting the concept of heat balance. During the quench, the wire temperature increased more slowly for longer wires, but was found to increase in a similar pattern. The wire length estimated by the mathematical formula was close to the one obtained by the simulation, with an error range of a few %. The calculations will be used to estimate effectively the length of wires needed to build superconducting fault current limiters for applications in DC power systems.
To ensure high-voltage stability and thermal resistance of insulation paper used in transformers, this study evaluated the structural and electrical properties of four types of insulation paper samples fabricated using unbleached kraft pulp (UKP). The samples were prepared under controlled conditions with different freeness levels (300-700 ml). Tensile strength, dielectric constant, breakdown strength (dry and oil), volume resistivity, water absorption, and oil absorption were quantitatively measured. The sample with a beating degree of 300 exhibited the highest breakdown strength (53.85 kV/mm) and volume resistivity (1.49×1016 Ω·cm), whereas the samples with higher beating intensity showed improved fiber bonding and densification. These findings demonstrate the practical applicability of UKP-based insulation paper as a high-performance, eco-friendly insulating material for transformer systems, providing a scientific foundation for process optimization in insulation paper design.
e investigated the effects of post-annealing in vacuum, nitrogen, and hydrogen atmospheres on the structural, electrical, and optical properties of 600 nm thick Al-doped ZnO (ZnO:Al) thin films deposited by RF magnetron sputtering at room temperature. Post-annealing in hydrogen atmosphere at 400℃ for 1 hour showed the most significant improvement in electrical properties. Resistivity decreased from 9.11×10⁻³ to 1.4×10⁻³ Ω·cm, electron mobility increased from 4.11 to 18.23 cm²/V·s, and electron carrier concentration increased from 1.63×10²⁰ to 4.85×10²⁰ cm⁻³. In contrast, post-annealing in vacuum and nitrogen atmospheres resulted in degraded electrical properties due to oxygen and nitrogen chemisorption at grain boundaries. The enhancement in hydrogen-annealed films was attributed to the formation of additional oxygen vacancies and desorption of adsorbed oxygen species from grain boundaries. All films maintained excellent optical transparency of 80-90% in the visible range. The optical bandgap exhibited a blue-shift from 3.365 eV to 3.624 eV due to the Burstein-Moss effect induced by the increased electron carrier concentration. These results confirmed that hydrogen atmosphere post-annealing is the most effective method for enhancing the electrical conductivity of ZnO:Al thin films while maintaining high optical transparency.
(La1-xBixSr0.3)FeO₃ ceramics exhibiting excellent magnetoresistance were synthesized via the conventional solid-state reaction method. The structural and electrical properties were investigated as a function of Bi3+ content to evaluate their potential application as temperature sensors. And the sintering temperature and time were 1,200℃ and 4 h, respectively. The structural and electrical properties were investigated as a function of Bi content. With increasing Bi substitution, a slight enhancement in both average grain size and relative sintered density was observed. In particular, the specimen with x = 0.3 exhibited an average grain size of approximately 0.82 μm. All samples demonstrated negative temperature coefficient of resistance (NTCR) behavior, and the electrical resistivity decreased with increasing Bi content. The resistivity of the (La0.4Bi0.3Sr0.3)FeO₃ composition was 4.68 mΩ-cm at 25°C. Additionally, the temperature coefficient of resistance (TCR) and the B25/75-value, which quantify the sensitivity of resistivity to temperature variations, were found to increase with Bi content. (La0.4Bi0.3Sr0.3)FeO₃ sample exhibited a TCR of 0.43%/°C and a B25/75-value of 1,096 K at room temperature. The electrical conduction mechanism of the (La1-xBixSr0.3)FeO₃ system was well described by the small polaron hopping model, wherein thermally activated charge carriers hop between localized Fe-O-Fe sites via electron-phonon interactions.
Micro-LEDs, which have a chip size of less than 100 × 100 μm², have been potential candidates for conventional LCDs and OLEDs due to their high optical power, outstanding stability, and nanosecond response time. However, Micro-LED chips are fabricated only on limited substrates due to the high-temperature metal-organic chemical vapor deposition process and lattice-mismatch issues. Therefore, the fabrication of Micro-LED displays requires complex processes such as chip fabrication, transfer, bonding, and repair. Especially, Micro-LED transfer and bonding have been critical challenges for the Micro-LED display commercialization. Here, recent advances in the transfer and bonding of Micro-LEDs are introduced, and novel Micro- LED display fabrication methods are reviewed to provide a practical outlook for both mass production and commercialization of Micro-LED displays.
Quantum dots (QDs) offer size-dependent tunability across the infrared to ultraviolet range with narrow emission linewidths and high color purity, making them highly attractive for next-generation light-emitting devices. Quantum dot lightemitting diodes (QLEDs) further combine precise spectral control with scalable, low-cost solution processing, positioning them as strong candidates for wearable, stretchable, and AR/VR display technologies. However, conventional single-emission QLEDs suffer from charge imbalance, efficiency roll-off, and limited operational lifetime, necessitating new device architectures. Tandem QLEDs, which vertically stack multiple emissive layers (EMLs) connected by charge generation layers (CGLs), provide a compelling solution by enabling higher luminance, improved charge balance, and longer lifetime at equivalent current density. The CGL serves as the interfacial region mediating charge injection and generation between adjacent EMLs, directly determining device efficiency and stability. This review highlights recent progress in CGL engineering, categorizing representative designs into planar heterojunction, inorganic-based, and dipole-based configurations. Comparative analysis of their formation mechanisms, material systems, and process compatibilities reveals evolving charge-control strategies that extend beyond material selection. These insights establish design principles for next-generation tandem QLEDs with enhanced efficiency, durability, and manufacturability.
Silicon carbon nitride (SiCN) thin films are promising materials for copper diffusion barriers and hybrid bonding in semiconductor processes. Oxidation-resistant films are increasingly critical for realizing high-reliability devices, highlighting the need for process control and property evaluation. In this study, we analyzed the thin film properties as a function of tetramethylsilane (4MS) gas partial pressure ratio (PPR), deposition temperature, and dual-power plasma conditions in a PECVD-based SiCN deposition process. Based on the results, we experimentally demonstrated that the refractive index can be a valid indicator for oxidation resistance evaluation. The application of dual-power plasma conditions was instrumental in enhancing oxidation resistance. Under these conditions, the refractive index reached approximately 1.90 even at 200℃, comparable to values observed in films deposited at 350℃. These findings provide a basis for predicting oxidation resistance and optimizing low-temperature conditions, with applications in next-generation semiconductor and packaging technologies requiring high reliability.
Abstract In this study, to develop composition ceramics for energy harvesting devices, Pb(Ni1/3Nb2/3)O₃-Pb(Zr Ti)O₃ system ceramics substituted with Pb(Mg1/2W1/2)O₃ were manufactured by conventional mixed oxide method using Li₂CO₃ and Na₂CO₃ (LNCO) as sintering aids. Their microstructure and piezoelectric properties were also investigated. At the specimen sintered at 930℃, high values of piezoelectric properties appeared: the dielectric constant (εr) of 2,522 planar electromechanical coupling factor kp of 0.602, and k31 of 0.385, d31 = 229 [pC/N], g31 = 10.13 [mV.m/N], Qm of 70, respectively. These values were suitable for the application of devices such as energy harvesting devices and ultrasonic devices.
With the ongoing rise in renewable energy demand, offshore wind farms are rapidly expanding, increasing the need for advanced development and diagnostic techniques for submarine cables. These cables are essential for efficient and reliable power transmission. A critical issue with these submarine cables is the formation of internal hot spots, which can deteriorate the insulation’s performance and negatively impact the overall reliability of offshore wind energy infrastructure. This research focuses on developing an innovative real-time monitoring system to detect hot spots within submarine cable insulation under varying electrical loads. Experimental tests were conducted on a 66 kV-grade wet-type submarine cable specifically designed for offshore wind applications, applying incremental current loads ranging from 200 A to 500 A. Temperature changes within the insulation due to the generated heat were continuously monitored using Distributed Temperature Sensing (DTS). Additionally, to evaluate the DTS system’s precision, repeatability, and overall reliability, the measured temperatures were compared against values obtained from validated spot-type sensors. Experimental results showed a discrepancy of less than 1% between DTS and spot-type sensor measurements at a reference temperature of 60℃, demonstrating the high accuracy and reliability of the developed DTS-based monitoring system. The outcomes of this study suggest that the proposed monitoring system can significantly enhance the capability for early detection and continuous monitoring of hot spots, thereby improving the operational reliability of submarine cables employed in offshore wind energy installations.
This study investigates the insulation performance of a 66 kV dry-type submarine cable used in offshore wind farms under mechanical aging. During installation and operation, submarine cables are subjected to various mechanical stresses, including tension, compression, and bending, which can lead to insulation deterioration. In this study, XLPE samples extracted from a submarine cable were prepared and subjected to controlled tensile strain below the yield strain to evaluate their mechanical and electrical performance. Changes in tensile strength, elongation, and tan δ (dielectric loss factor) were measured to assess the extent of aging. The results indicate that as the applied strain and exposure duration increased, tensile strength and elongation decreased, while tan δ values increased, signifying a decline in electrical insulation performance. A strong negative correlation (R = -0.809) was observed between tan δ and tensile strength, demonstrating that mechanical aging significantly affects electrical properties. These findings highlight the importance of minimizing excessive mechanical stress during the installation and operation of submarine cables. The results provide valuable insights for enhancing the reliability of submarine cables in offshore wind farms and emphasize the necessity of optimized design and maintenance strategies to mitigate the effects of mechanical aging.
The increasing demand for renewable energy is driving the rapid expansion of the offshore wind industry, leading to intensified research on subsea cables. These cables endure combined thermal, electrical, and mechanical stresses, with mechanical stress being a critical failure factor. Environmental changes, such as seabed scouring, free spans, and seismic activity, accelerate cable degradation by introducing additional dynamic loads. Conventional monitoring systems primarily track thermal stress, lacking the ability to assess mechanical impacts. This study develops a system to simultaneously measure thermal and mechanical stress in subsea cables. Laboratory experiments confirm the system’s reliability, showing a temperature measurement error within 0.8% at 60℃ and a strain measurement error within 13% at 378 με. The proposed system aims to enhance failure prediction and maintenance strategies for offshore wind subsea cables.
Drain Induced Barrier Lowering (DIBL) was analyzed when the channel of Gate-All-Around (GAA) FET, which is the most promising in the miniaturizing transistor structure, has an elliptic cross-section. The oxide film structure used a stacked Metal-Ferroelectric-Metal-Insulator-Semiconductor (MFMIS) structure using SiO2 and ferroelectric. An analytical DIBL model was presented to analyze the DIBL in elliptic GAA FET with ferroelectric. Its validity was proven by comparing the results of other papers. As a result, the Drain Induced Barrier Rising (DIBR) effect, that is, the negative DIBL effect, appeared depending on the ferroelectric thickness tfe, and the ratio of the remanent polarization Pr and coercive field Ec in the ferroelectric, Pr/Ec. The DIBL varied linearly with tfeEc/Pr, and the slope depended on the rate of change for the drain voltage of the ferroelectric charge Q, dQ/dVds. The tfeEc/Pr value satisfying DIBL=0 mV/V decreased as eccentricity increased. The ferroelectric thickness tfe will have to be decreased because the subthreshold swing increases if the Pr/Ec is increased to reduce the tfeEc/Pr value. The threshold voltage increased at this time, but the effect was minimal.
Lithium-ion batteries are utilized as an energy source for electric vehicles because of their advantages such as excellent cyclability, high energy density, high capacity, high efficiency, and low price. However, lithium-ion batteries use combustible electrolytes, which have also reported problems related to fire safety. Therefore, research on the fire safety of lithium-ion batteries is actively being conducted. In this study, detection criteria for the fire safety of lithium-ion batteries were proposed through incremental capacity analysis (ICA) and frequency analysis. The experimental results showed that the battery micro internal short circuit (MISC) indicator could be identified through changes in specific frequency bands and fluctuations in the ICA curve.
This study developed a dielectric composition for high-capacitance MLCCs with C0G and U2J temperature compensation characteristics (Class I) under reducing conditions. The potential application of this composition in highpermittivity class I MLCCs was examined. Using (Ba₀.₂₄Ca₀.₁₆Sr₀.₆)(TiₓZr₁₋ₓ)O₃. XRD analysis showed that secondary phases like Sr₂TiO₄ and TiO₂ formed at higher Ti content, affecting the stoichiometric balance. Adjusting the Ti/Zr molar ratio resulted in a dielectric constant of 41.2 ~ 105, a dielectric loss of 0.082 ~ 0.174%, and insulation resistance above 1.6 × 1013 ohms at 25℃. The TCC shifted from C0G to U2J as the Ti/Zr ratio increased, but the composition enabled the design of high-capacitance and high-voltage MLCCs with favorable dielectric and electrical properties.
NTC thermistors are essential components widely used for temperature sensing in various electronic sensor applications. However, conventional NTC thermistor ceramics typically require high sintering temperatures above 1150℃, necessitating the use of high-cost noble metal electrodes such as palladium (Pd) or platinum (Pt), which increases the overall manufacturing cost. In this study, low-melting-point oxides were successfully introduced as sintering aids to reduce the sintering temperature of NiMnCoO₄-based semiconducting ceramics. As the additive content increased, the B constant and average grain size exhibited an increasing trend, while the sample containing 5 wt% additives showed the lowest room-temperature resistivity. Furthermore, samples sintered at 1000℃ demonstrated slightly higher room-temperature resistivity and B constant values compared to those sintered at 1150℃. These results confirm that the addition of low-melting-point oxides is effective in lowering the sintering temperature of NiMnCoO₄ ceramics, suggesting the potential for reducing production costs and improving design flexibility in thermistor fabrication.
Conductive inks are essential for developing flexible and wearable electronic devices, where printability and electrical performance must be finely balanced. However, achieving high conductivity while minimizing costly silver filler content remains a key challenge in ink formulation. In this work, we demonstrate that a simple ball-milling process transforms spherical silver particles into platelet-shaped fillers, dramatically enhancing conductivity at equivalent filler loading. The resulting inks show a reduction in sheet resistance from ~180 Ω/□ to ~ 0.57 Ω/□ at 70 wt% filler content, with improved performance attributed to surface-to-surface contact between platelets. Moreover, we show that filler content influences not only electrical conductivity but also ink viscosity, with the 53.8 wt% formulation achieving a practical balance between conductivity, processability, and cost. This morphology- and composition-controlled ink design offers a scalable strategy for manufacturing high-performance, cost-effective conductive inks suitable for next-generation printed electronics.
The composite specimens of (1-x)(La0.7Sr0.3)MnO₃-xBaTiO₃ (x = 0.05 ~ 0.3) were synthesized using the conventional solid-state reaction method, and the sintering temperature and time were 1,300℃ and 3 hours, respectively. As a result of observing the structural characteristics, the crystal structure of LSMO-BT solid solution was shown in which the rhombohedral LSMO phase and the tetragonal BT phase were separated and distributed, respectively. And fine grains having relatively small and uniformly distributed grains with sizes ranging from approximately 0.4 to 0.5 μm and pores within the specimens were observed. Notably, variations in the BT content did not significantly affect the grain size or porosity distribution, and a relative density of about 90% or more was shown. The resistivity, temperature coefficient of resistance (TCR), and B25/65-value of the 0.7LSMO-0.3BT specimen at room temperature showed the highest values of 1.94 Ω-cm, 0.292 %/℃, and 464 K, respectively. The resistivity behavior of the LSMO-BT composites matched well with the small polaron hopping conduction model.
With the expansion of offshore wind farms, research on power cables for delivering electricity from offshore to onshore has become increasingly important. In offshore wind farms, submarine cables are introduced and secured to the platform through J-tube conduits. During this process, the cables are exposed to three distinct thermal profiles: high temperatures in the upper section, temperature fluctuations due to water level changes in the middle section, and low temperatures in the seabed region. This study investigates the impact of thermal variations on the insulation performance of submarine cables. To analyze this effect, accelerated aging tests were conducted on both insulation specimens and actual cables. Additionally, dielectric breakdown tests were performed to quantitatively assess insulation degradation. Experimental results revealed that the insulation performance of the specimens exposed to periodic temperature fluctuations due to water level changes deteriorated by up to 7.5%. Based on these findings, the vulnerable sections of submarine cables in offshore wind farms were identified. Furthermore, this study emphasizes the necessity for monitoring and protective measures to mitigate insulation degradation in these critical regions.
The characteristics of each address discharge were investigated when the voltages of the scan and common electrodes were lowered simultaneously during an address period under the same address voltage conditions in an AC plasma display panel. It was confirmed that the delay time of address discharge shortened as the voltage decreased. However, the background light increased because the low scanning voltage generated more discharge between the electrodes of the upper and lower plates in the reset period. To lower the background light, a positive voltage was applied to the address electrode of the lower panel during the period when the rising ramp wave was applied, and a floating voltage was applied to the address electrode during the period when the falling ramp wave was applied during the reset period. As a result, the background light could be lowered by about 30%.
Ceramic powder is an important material used for various purposes in advanced industries, and the fundamental properties of ceramic powder such as particle size, particle size distribution, and flow properties play a decisive role in determining the quality and performance of the final product. In general, these properties have been evaluated through particle size and shape analysis. However, these methods have limitations in providing a comprehensive understanding phenomena related to powder flow, coagulation, and wear. Consequently, performance evaluation based on the analysis of powder flow properties has been increasingly adopted. Previously, flow properties were primarily assessed using funnel-based methods. However, these methods have limitations, as they are challenging to apply to powders smaller than a few micrometers or those with strong coagulation tendencies, and they also suffer from low reliability. To address these issues, this paper introduces a novel piece of equipment that measures flow properties using image analysis and presents various parameters for static and dynamic flow behavior based on this technique. The proposed equipment offers exceptional versatility, as it can be applied to all types of ceramic powders regardless of their size or shape. The principles and measurement methods of the equipment are demonstrated through static and dynamic image analysis of ceramic powders with varying sizes and shapes used as examples.
This review examines the principles, limitations, and recent advancements in elastic modulus measurement using nanoindentation. The importance of accurate contact area prediction is discussed, along with the Oliver-Pharr method and its limitations. The Continuous Stiffness Measurement (CSM) technique is presented as a significant improvement, allowing continuous measurement of mechanical properties throughout the indentation process. For ultra-thin films, the Li and Vlassak method, which incorporates Yu's solution and the concept of effective thickness, is highlighted as a means to correct for substrate effects. Recent developments in artificial neural network-based models for elastic modulus prediction are also explored. These advancements have greatly expanded the applicability of nanoindentation in semiconductor and MEMS device reliability assessment.
The growing demand for miniaturized, lightweight, and sustainable electronic devices has intensified the need for advanced bonding materials. Existing electrically conductive adhesives (ECAs) often rely on high silver (Ag) content, resulting in elevated costs and environmental concerns. This study successfully developed a novel ECA with significantly reduced Ag content without compromising essential electrical conductivity and adhesion performance. Experimental results revealed that the optimized ECA demonstrates electrical conductivity comparable to that of commercial products, with notable advantages in cost reduction and eco-friendliness. These advancements position the developed ECA as a promising solution for next-generation electronic manufacturing, contributing to low-carbon technologies and sustainable practices. Future applications could further broaden its use across diverse electronic systems, driving progress in environmentally conscious technologies.
The quench behavior of coated conductors (CCs) was simulated with a focus on the initial stage of quenches, and the current limiting behavior of superconducting fault current limiters (SFCLs) at DC faults was calculated. Since the fault current reaches the peak in several ms in DC lines due to capacitor discharge, it is necessary to understand the initial quench behavior well. Considered in the simulation are characteristics of CCs in the flux-flow state, current sharing, non-uniform critical current distribution in CCs, and heat transfer to surroundings. The simulation fit data well. Using the CC model developed in the simulation, the current limiting behavior of SFCLs made of CCs at DC faults was calculated. Critical current distribution and heat transfer were found to affect the current limiting behavior of SFCLs less at DC faults. The calculation will contribute to the effective design of SFCLs for applications in DC lines.
In parallel with the efforts to improve the device performance in modern integrated circuits, it is necessary to downscale their core components, field-effect transistors (FETs), generally gauged by their physical gate length. Upon such device scaling, the emergence of the short-channel effect impedes further scaling into the nanometer scale in the silicon VLSI (Very-Large-Scale-Integration) system. To address this issue, two-dimensional (2D) semiconductors, leveraging their atomically thin thickness and dangling-bond-free characteristics, are being highlighted as a material solution for future scaling technology without severe mobility degradation. Despite the expected ideal physical properties, 2D semiconductors have yet to realize their full potential owing to the limited development of integration technology. In this context, we survey and review the tailored van der Waals integration technologies for 2D FETs. In particular, we provide an in-depth study of both van der Waals integrated contact and dielectric methods along with an explanation of customized materials. In essence, this van der Waals integrationcentered approach will be a core strategy to implement the high-performance 2D transistors that meet the demand of FET miniaturization.
Post-metallization annealing (PMA) has been employed in silicon-based CMOS fabrication to enhance MOSFET reliability and performance. However, although deuterium annealing can reduce interface traps between the Si and SiO₂ gate dielectric, it remains insufficient to fully passivate these traps. In this context, a multiple PMA process, including additional hydrogen annealing, is proposed to further reduce dangling bonds. Silicon-based MOSFETs are fabricated to verify the proposed annealing process architecture. Electrical characterization of the threshold voltage (VTH), subthreshold swing (SS), on-state current (ION), and carrier mobility (μn) is conducted to investigate the impact of the multiple PMA. This study provides a guideline for PMA in MOSFET fabrication, with improvements in both performance and reliability.
This paper presented an analytical SS model to determine the subthreshold swing (SS) of an elliptic junctionless Gate- All-Around (GAA) FET using ferroelectric. Analyzing a GAA FET with an elliptic cross-section was essential because it is difficult to manufacture a perfectly circular GAA FET. The results of the proposed SS model agreed well with 2D numerical simulation. Using this analytical SS model, SS was analyzed for the eccentricity and the ratio (Pr/Ec) of permanent polarization Pr and coercive electric field Ec in an elliptic junctionless GAA FET with an MFMIS (Metal-Ferroelectric-Metal-Isulator- Semiconductor) structure using ferroelectric. As a result, the changing rate of the average surface potential due to the gate voltage increased and SS decreased as the eccentricity increased. It was found that the inner gate voltage amplified more than the outer gate voltage due to the ferroelectricity, better controlling the carriers in the channel, thereby reducing SS. As the Pr/Ec decreased, the changing rate of the ferroelectric charge for the outer gate voltage increased and SS decreased. As the eccentricity increased, the changing rate of SS for Pr/Ec decreased. There was no significant change in SS until the eccentricity was about 0.5. The SS began to decline above 0.5 due to the changes in ferroelectric charge, inner gate voltage, and average surface potential for the outer gate voltage.