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Optimization of 1.2 kV 4H-SiC MOSFETs with Vertical Variation Doping Structure
Ye-jin Kim, Seung-hyun Park, Tae-hee Lee, Ji-soo Choi, Se-rim Park, Geon-hee Lee, Jong-min Oh, Weon Ho Shin, Sang-mo Koo
J Electr Electron Mater 2024;37(3):332-336.   Published online May 1, 2024
DOI: https://doi.org/10.4313/JKEM.2024.37.3.15
High-energy bandgap material silicon carbide (SiC) is gaining attention as a next-generation power semiconductor material, and in particular, SiC-based MOSFETs are developed as representative power semiconductors to increase the breakdown voltage (BV) of conventional planar structures. However, as the size of SJ (Super Junction) MOSFET devices decreases and the depth of pillars increases, it becomes challenging to uniformly form the doping concentration of pillars. Therefore, a structure with different doping concentrations segmented within the pillar is being researched. Using Silvaco TCAD simulation, a SJ VVD (vertical variation doping profile) MOSFET with three different doping concentrations in the pillar was studied. Simulations were conducted for the width of the pillar and the doping concentration of N-epi, revealing that as the width of the pillar increases, the depletion region widens, leading to an increase in on-specific resistance (Ron,sp) and breakdown voltage (BV). Additionally, as the doping concentration of N-epi increases, the number of carriers increases, and the depletion region narrows, resulting in a decrease in Ron,sp and BV. The optimized SJ VVD MOSFET exhibits a very high figure of merit (BFOM) of 13,400 KW/cm2, indicating excellent performance characteristics and suggesting its potential as a next-generation highperformance power device suitable for practical applications.
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A Study on Pad Profile Variation using Kinematical Analysis on Swing Arm Conditioner
Ji Heon Oh, Sang Jik Lee, Ho Jun Lee, Han Chul Cho, Hyun Seop Lee, Hyoung Jae Kim, Hae Do Jeong
J Electr Electron Mater 2008;21(11):963-967.   Published online November 1, 2008
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Polishing Pad Analysis and Improvement to Control Performance
J Electr Electron Mater 2007;20(10):839-845.   Published online October 1, 2007
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Annealing Effects on Concentration Profiles of Deep Energy Levels in Platinum-diffused Silicon
J Electr Electron Mater 2007;20(3):207-212.   Published online March 1, 2007
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A Study on The Improvement of Profile Tilting or Bottom Distortion in HARC
J Electr Electron Mater 2005;18(5):389-395.   Published online May 1, 2005
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