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Zeta potential
WHERE t1.sid in(parameter_dbtbl_keyword '%Zeta potential%') and t1.xml_status <> 99
3
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"Zeta potential"
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Zeta potential (3)
Break-In (1)
brush (1)
Brush contamination (1)
CMP (1)
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2009 (1)
2008 (1)
2007 (1)
Authors
Young Jin An (1)
Han Chul Cho (1)
Sang Su Choi (1)
Hae Do Jeong (1)
Byung Sun Kang (1)
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Keywords
Zeta potential (3)
Break-In (1)
brush (1)
Brush contamination (1)
CMP (1)
Conditioning (1)
Contamination (1)
Dressor (1)
Mask (1)
MoSi film (1)
Plasma etching (1)
Post-CMP cleaning (1)
PVA (1)
Surface roughness (1)
Wet cleaning (1)
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authors
Young Jin An (1)
Han Chul Cho (1)
Sang Su Choi (1)
Hae Do Jeong (1)
Byung Sun Kang (1)
Jwa Yeon Kim (1)
Suk Joo Kim (1)
Dong Soo Min (1)
Min Jong Yuh (1)
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"Zeta potential"
Effect of PVA Brush Contamination on Post-CMP Cleaning Performance
Han Chul Cho, Min Jong Yuh, Suk Joo Kim, Hae Do Jeong
J Electr Electron Mater
2009;22(2):114-118.
Published online February 1, 2009
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The Characteristic Variation of Mask with Plasma Treatment
Jwa Yeon Kim, Sang Su Choi, Byung Sun Kang, Dong Soo Min, Young Jin An
J Electr Electron Mater
2008;21(2):111-117.
Published online February 1, 2008
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Stability and Improvement of Polishing Pad in W CMP
J Electr Electron Mater
2007;20(12):1027-1033.
Published online December 1, 2007
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