This paper presents the development and market trends of nano biosensors. These biosensors must possess high sensitivity and selectivity to effectively detect diseases. Presently, many research groups are focusing on the field-effect transistor aspect of nano biosensors, which can identify diseases such as Down syndrome, bladder cancer, breast cancer, and numerous other cancers, utilizing graphene and transition metal dichalcogenide materials. In the case of in-vitro diagnostics, the use of nano biosensors has been rapidly growing since the onset of the COVID-19 pandemic. This paper also discusses market trends and the outlook for both national and international enterprises engaged in the nano biosensor field. Nano biosensors are expected to play a beneficial and significant role soon, contributing to the early diagnosis of diseases and subsequently improving patient outcomes.

Controlling ambient humid condition through high performance humidity sensors has become important for various fields, including industrial process, food storage, and the preservation of historic remains. Although aerosol deposited humidity sensors using ceramic BaTiO₃ (BT) material have been widely studied because of their longtime stability, there remain critical disadvantages, such as low sensitivity, low linearity, and slow response/recovery time in case of the sensors fabricated at room temperature. To achieve superior humidity sensing properties even at room temperature condition, BT-Cu composite films utilizing aerosol deposition (AD) process have been proposed based on the percolation theory. The BT-Cu composite films showed gradually improved sensing properties until the Cu concentration reached 15 wt% in the composite film. However, the excessive Cu (above 30 wt%) containing BT-Cu composite films showed a rapid decrease of the sensing properties. The results of observed surface morphology of the AD fabricated composite films, to figure out the metal filler effect, showed correlation between surface topography as well as size and the amount of open pores according to the metal filler content. Overall, it is very important not only dielectric constant of the humidity sensing films but also microstructures, because they affect either the variation range of capacitance by ambient humidity or adsorption/desorption of ambient humidity onto/from the humidity sensing films.

In this study, we produced a light, flexible, wearable gas sensor by depositing MWCNTs (Multi-walled Carbon Nanotubes) into nylon. MWCNTs are widely used as a gas sensor material due to their excellent mechanical, electrical and physical characteristics. We produced a gas sensor to detect NOx gases by depositing nylon yarn in a MWCNT solution. The MWCNT solution was made by mixing 3 mg MWCNT in 5 ml of ethanol. Nylon yarn was placed in the manufactured solution and ultrasonic waves were applied using an ultrasonicator for 3 h, resulting in MCWNT deposition. The MWCNT-deposited nylon yarn was dried at room temperature for 24 h. The MWCNT-thin-film-coated nylon yarn was masked 1 mm apart, and gold was then deposited on the masked nylon yarn to create the gas sensor. The sensor then was installed in a chamber with a controlled atmospheric environment and exposed to NOx gas. The changing signal from the sensor was amplified to analyze its gas detection characteristics.

A polysilicon-based metal-semiconductor-metal (MSM) photodetector was fabricated by means of our new methods. Its photoresponse characteristics were analyzed to see if it could be applied to a sensor system. The processes on which this study focused were an alloy-annealing process to form metal-polysilicon contacts, a post-annealing process for better light absorption of as-deposited polysilicon, and a passivation process for lowering defect density in polysilicon. When the alloy annealing was achieved at about 400℃, metal-polysilicon Schottky contacts sustained a stable potential barrier, decreasing the dark current. For better surface morphology of polysilicon, rapid thermal annealing (RTA) or furnace annealing at around 900℃ was suitable as a post-annealing process, because it supplied polysilicon layers with a smoother surface and a proper grain size for photon absorption. For the passivation of defects in polysilicon, hydrogen-ion implantation was chosen, because it is easy to implant hydrogen into the polysilicon. MSM photodetectors based on the suggested processes showed a higher sensitivity for photocurrent detection and a stable Schottky contact barrier to lower the dark current and are therefore applicable to sensor systems.

In this study, we fabricated a TFT gas sensor with ZnO nanorods grown by hydrothermal synthesis. The suggested devices were compared with the conventional ZnO film-type TFTs in terms of the gas-response properties and the electrical transfer characteristics. The ZnO seed layer is formed by atomic-layer deposition (ALD), and the precursors for the nanorods are zinc nitrate hexahydrate (Zn(NO₃)₂·6H₂O) and hexamethylenetetramine ((CH₂)6N₄). When 15 ppm of NO gas was supplied in a gas chamber at 150°C to analyze the sensing capability of the suggested devices, the sensitivity (S) was 4.5, showing that the nanorod-type devices respond sensitively to the external environment. These results can be explained by X-ray photoelectron spectroscopy (XPS) analysis, which showed that the oxygen deficiency of ZnO nanorods is higher than that of ZnO film, and confirms that the ZnO nanorod-type TFTs are advantageous for the fabrication of high-performance gas sensors.

In this study, we fabricated NOX gas sensor by using multi-walled carbon nanotubes(MWCNT)/zinc oxide(ZnO) composite film. Carbon nanotubes (CNTs) have good electronic, chemical-stability, and sensitivity characteristics. And zinc oxide (ZnO) is a wide band gap and large exciton binding energy semiconductor. In particular, gas sensors require characteristics such as high speed, sensitivity, and selectivity. The fabricated gas sensor was used to detect NOX gas for different values of the NOX gas concentrations. The gas sensor that absorbed NOX gas molecules showed a increasing in resistance. The sensitivity of the gas sensor was increased by increasing the gas concentrations. Additionally, while changing the temperature inside the chamber for the MWCNT/ZnO composite film gas sensor, we obtained the sensitivity. And the comparison analysis to ZnO film gas sensor for detecting NOX gas. From the experiment result, we confirmed improvement of NOX gas detection characteristics using the MWCNT/ZnO composite film.

Photoemission is a process in which photons are converted into free electrons. Photocathodesare the typical materials for the process. They emit electrons when a light is irradiated upon. Thetraditional method of manufacturing photocathodes is complicated, requires specialized equipment, and islimited very small sized samples. Cs3Sb photocathode was formed on a substrate in   atmosphericconditions. The photocathode formation was a gas phase reaction with the substrate. Vacuum deviceswere made to test electron emission characteristics of the formed photocathode. Visible light ofwavelength 475 nm was used for the primary light source. The results showed high current density andlong term stability of the photoelectron emission.

Based on both organic synthesis and theoretical calculations on the effects of molecular orbital energy levels of amines on the of fluorescence properties of the fluorophore, fluorescent "turn-on" chemosensors detecting hazardous substances, including aldehyde chemicals and Hg2 ion, were developed.

Embossed TiO2 thin films with high surface areas are achieved using soft-templates composed of monolayer polystyrene beads. The form of links between the beads in the templates is controlled by varying the O2 plasma etching time on the templates, resulting in various templates with close-linked, nano-linked, and isolated beads. Room-temperature deposition of TiO2 on the plasma-treated templates and calcination at 550℃ result in embossed films with tailored links between anatase TiO2 hollow hemispheres. Although all the embossed films have similar surface areas, the sensitivity of films with nano-linked TiO2 hollow hemispheres to 500 ppm CO and ethanol gases are much higher than that of films with close-linked and isolated hollow hemispheres, and the detection limits of them are as low as 0.6 ppm for CO and 0.1 ppm for ethanol. The strong correlation of sensitivity with the form of links between hollow hemispheres reveals the critical role of potential barriers formed at the links. The facile, large-scale, and on-chip fabrication of embossed TiO2 films with nano-linked hollow hemispheres on Si substrate and the high sensitivity without the aid of additives give us a sustainable competitive advantage over various methods for the fabrication of highly sensitive TiO2-based sensors.

We fabricated the electrolyte-insulator-semiconductor (EIS) devices with various high-k sensing membranes to realize a high quality pH sensor. The sensing properties of each high-k dielectric material were compared with those of conventional SiO2 (O) and SiO2/Si3N4 (ON) membranes. As a result, the high-k sensing membranes demonstrated better sensitivity and stability than the O and ON membranes. Especially, the SiO2/HfO2 (OH) stacked layer showed a high sensitivity and the SiO2/Al2O3 (OA) stacked layer exhibited an excellent chemical stability. In conclusion, the high-k sensing membranes are expected to have excellent operating characteristics in terms of sensitivity and chemical stability for the biosensor application.

SnO2 nano powders were prepared by solution reduction method using tin chloride(SnCl2·2H2O), hydrazine(N2H4) and NaOH. The SnO2 thick films for gas sensors were fabricated by screen printing method on alumina substrates and annealed at 300℃ in air, respectively. XRD patterns of the SnO2 nano powders showed the tetragonal structure with (110) dominant orientation. The particle size of SnO2 nano powders at the ratio of SnCl2:N2H4+NaOH= 1:6 was about 60 nm. The sensing characteristics were investigated by measuring the electrical resistance of each sensor in a test box. Sensitivity of SnO2 gas sensor to 5 ppm CH4 gas and 5 ppm CH3CH2CH3 gas was investigated for various SnCl2:N2H4+NaOH proportion. The highest sensitivity to CH4 gas and CH3CH2CH3 gas of SnO2 sensors was observed at the SnCl2:N2H4+NaOH= 1:8 and SnCl2:N2H4+NaOH= 1:6, respectively. Response and recovery times of SnO2 gas sensors prepared by SnCl2:N2H4+NaOH= 1:6 was about 40 s and 30 s, respectively.

Carbon nanotubes (CNTs) have excellent electrical, chemical stability, mechanical and thermal properties. In this paper, networks of Multi-walled carbon nanotube (MWCNT) materials were investigated as a resistive gas sensors for the H2 gas detection. Sensor films were fabricated by the air spray method using the multi-walled CNTs dispersion solution on the glass substrates cured with plasma and nitrocellulose. Sensors were characterized by the resistance measurements in the self-fabricated oven in order to find the optimum detection properties for the hydrogen gas molecular. The sensitivity and the linearity of the MWVNT sensors using the glass substrate cured with plasma for the H2 gas concentration of 0.06∼0.6 ppm are 0.013∼0.097%/sec and 0.131∼0.959%FS, respectively. The MWCNT film was excellent in the response for the hydrogen gas moleculars and its reaction speed was very fast, which could be using as hydrogen gas sensor. The resistance of the fabricated sensors decreases when the sensors are exposed to H2 gas.

CdSe films were deposited on glass substrates (CdSe/glass) by thermal evaporation. Substrate temperature was lowered by cooling substrate holder with liquid nitrogen. Substrate temperatures were 200℃, 0℃ and -40℃. The crystallographic properties and surface morphologies of the CdSe/glass films were studied by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The optical and electrical properties of the films were investigated by dependence of energy gap, photosensitivity and resistivity on the substrate temperature. CdSe/glass showed energy gap of ～1.72 eV regardless of substrate temperature. The resistivity of the films decreased to 0.5 Ωcm by lowering the substrate temperature to -40℃. The CdSe/glass films prepared at 0℃ showed the highest photosensitivity among the films in this study.

Abstract: Cu doped SnO(2) thick films for gas sensors were fabricated by screen printing method on alumina substrates and annealed at 500℃ in air, respectively. Structural properties of SnO(2) by X-ray diffraction showed (110), (101) and (211) dominant tetragonal phase. The effects of catalyst Cu in SnO(2)-based gas sensors were investigated. Sensitivity of SnO(2):Cu sensors to 2,000 ppm CO(2) gas and 50 ppm H(2)S gas was investigated for various Cu concentration. The highest sensitivity to CO(2) gas and H(2)S gas of Cu doped SnO(2) gas sensors was observed at the 8 wt% and 12 wt% Cu concentration, respectively. The improved sensitivity in the Cu doped SnO(2) gas sensors was explained by decrease of electron depletion region in Cu and SnO(2) junction, and increase of reactive oxygen and surface area in the SnO(2).