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Al2O3 기판에 형성된 Titanium 박막의 전기적 및 구조적 특성

정운조, 양현훈, 임정명, 김영준, 박계춘

Electrical and Structural Properties of Ti Thin Films on Al2O3 Substrate

Un Jo Jeong, Hyeon Hun Yang, Jeong Myeong Im, Yeong Jun Kim, Gye Chun Park
J Electr Electron Mater 2003;16(9):753-758.
Published online: September 1, 2003
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Electrical and Structural Properties of Ti Thin Films on Al2O3 Substrate
J Electr Electron Mater. 2003;16(9):753-758.   Published online September 1, 2003
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Electrical and Structural Properties of Ti Thin Films on Al2O3 Substrate
J Electr Electron Mater. 2003;16(9):753-758.   Published online September 1, 2003
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