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Al2O3 기판에 형성된 Titanium 박막의 전기적 및 구조적 특성

정운조, 양현훈, 임정명, 김영준, 박계춘

Electrical and Structural Properties of Ti Thin Films on Al2O3 Substrate

Un Jo Jeong, Hyeon Hun Yang, Jeong Myeong Im, Yeong Jun Kim, Gye Chun Park
J Korean Inst Electr Electron Mater Eng 2003;16(9):753-758.
Published online: September 1, 2003
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Electrical and Structural Properties of Ti Thin Films on Al2O3 Substrate
J Korean Inst Electr Electron Mater Eng. 2003;16(9):753-758.   Published online September 1, 2003
DOI: https://doi.org/10.4313/JKEM.2003.16.9.753
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Electrical and Structural Properties of Ti Thin Films on Al2O3 Substrate
J Korean Inst Electr Electron Mater Eng. 2003;16(9):753-758.   Published online September 1, 2003
DOI: https://doi.org/10.4313/JKEM.2003.16.9.753
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