Characterization of Pb(Zr0.2Ti0.8)O3 Thin Films Deposited at Various Temperatures on SrRuO3/SrTiO3 Substrates by Pulsed Laser Deposition

doi:10.4313/JKEM.2005.18.9.810

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Pulsed Laser Deposition에 의해 SrRuO3/SrTiO3 기판위에 여러 가지 증착온도에서 증착된 Pb(Zr0.2Ti0.8)O3 박막의 특성

이우성, 정관호, 김도훈, 김시원, 김형준, 박종령, 송영필, 윤희근, 이세민, 최인혁, 윤순길

Characterization of Pb(Zr0.2Ti0.8)O3 Thin Films Deposited at Various Temperatures on SrRuO3/SrTiO3 Substrates by Pulsed Laser Deposition

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J Korean Inst Electr Electron Mater Eng 2005;18(9):810-814.
Published online: September 1, 2005

DOI: https://doi.org/10.4313/JKEM.2005.18.9.810

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Keywords: Pulsed Laser deposition, Pb(Zr,Ti)O3(PZT), AFM, XRD, P-E Loops

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Characterization of Pb(Zr0.2Ti0.8)O3 Thin Films Deposited at Various Temperatures on SrRuO3/SrTiO3 Substrates by Pulsed Laser Deposition

J Korean Inst Electr Electron Mater Eng. 2005;18(9):810-814. Published online September 1, 2005

DOI: https://doi.org/10.4313/JKEM.2005.18.9.810

Download Citation

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Characterization of Pb(Zr0.2Ti0.8)O3 Thin Films Deposited at Various Temperatures on SrRuO3/SrTiO3 Substrates by Pulsed Laser Deposition

J Korean Inst Electr Electron Mater Eng. 2005;18(9):810-814. Published online September 1, 2005

DOI: https://doi.org/10.4313/JKEM.2005.18.9.810

Articles

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Pulsed Laser Deposition에 의해 SrRuO3/SrTiO3 기판위에 여러 가지 증착온도에서 증착된 Pb(Zr0.2Ti0.8)O3 박막의 특성

Characterization of Pb(Zr0.2Ti0.8)O3 Thin Films Deposited at Various Temperatures on SrRuO3/SrTiO3 Substrates by Pulsed Laser Deposition

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