Electrical Characteristics of ZnO Piezo-electric Thin Film for SAW Filter

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SAW 필터용 ZnO 압전 박막의 전기적 특성

이동윤, 윤석진

Electrical Characteristics of ZnO Piezo-electric Thin Film for SAW Filter

J Electr Electron Mater 2005;18(10):909-916.
Published online: October 1, 2005

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Keywords: ZnO, Preferred orientation, Roughness, Resistivity, Stoichiometric

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Electrical Characteristics of ZnO Piezo-electric Thin Film for SAW Filter

J Electr Electron Mater. 2005;18(10):909-916. Published online October 1, 2005

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Electrical Characteristics of ZnO Piezo-electric Thin Film for SAW Filter

J Electr Electron Mater. 2005;18(10):909-916. Published online October 1, 2005

Articles

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SAW 필터용 ZnO 압전 박막의 전기적 특성

Electrical Characteristics of ZnO Piezo-electric Thin Film for SAW Filter

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