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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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반응성 RF 마그네트론 스퍼터링 법을 이용한 AIN/SiC 구조의 제작 및 특성

김용성, 김광호

Fabrication and Properties of AIN/SiC Structures using Reactive RF Magnetron Sputtering Method

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J Electr Electron Mater 2005;18(11):977-982.
Published online: November 1, 2005
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Fabrication and Properties of AIN/SiC Structures using Reactive RF Magnetron Sputtering Method
J Electr Electron Mater. 2005;18(11):977-982.   Published online November 1, 2005
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Fabrication and Properties of AIN/SiC Structures using Reactive RF Magnetron Sputtering Method
J Electr Electron Mater. 2005;18(11):977-982.   Published online November 1, 2005
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