Study on the Silicon Nano-needle Structure for Nano Floating Gate Memory Application

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나노 부유 게이트 메모리 소자 응용을 위한 실리콘 나노-바늘 구조에 관한 연구

정성욱, 유진수, 김영국, 김경해, 이준신

Study on the Silicon Nano-needle Structure for Nano Floating Gate Memory Application

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J Electr Electron Mater 2005;18(12):1069-1074.
Published online: December 1, 2005

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Keywords: Floating gate, Nano-needle, Reactive ion etching, MIS

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Study on the Silicon Nano-needle Structure for Nano Floating Gate Memory Application

J Electr Electron Mater. 2005;18(12):1069-1074. Published online December 1, 2005

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Study on the Silicon Nano-needle Structure for Nano Floating Gate Memory Application

J Electr Electron Mater. 2005;18(12):1069-1074. Published online December 1, 2005

Articles

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나노 부유 게이트 메모리 소자 응용을 위한 실리콘 나노-바늘 구조에 관한 연구

Study on the Silicon Nano-needle Structure for Nano Floating Gate Memory Application

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