Electrical Characterization of Nano SOI Wafer by Pseudo MOSFET

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Pseudo MOSFET을 이용한 Nano SOI 웨이퍼의 전기적 특성분석

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Electrical Characterization of Nano SOI Wafer by Pseudo MOSFET

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J Electr Electron Mater 2005;18(12):1075-1079.
Published online: December 1, 2005

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Keywords: SOI, Characterization, Pseudo MOSFET, Etching Nano SOI

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Electrical Characterization of Nano SOI Wafer by Pseudo MOSFET

J Electr Electron Mater. 2005;18(12):1075-1079. Published online December 1, 2005

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Electrical Characterization of Nano SOI Wafer by Pseudo MOSFET

J Electr Electron Mater. 2005;18(12):1075-1079. Published online December 1, 2005

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Pseudo MOSFET을 이용한 Nano SOI 웨이퍼의 전기적 특성분석

Electrical Characterization of Nano SOI Wafer by Pseudo MOSFET

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