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마이크로웨이브 플라즈마 화학기상증착법에 의한 탄소나노튜브의 성장특성

최성헌, 이재형

Growth of Carbon Nanotubes by Microwave Plasma Enhanced Chemical Vapor Deposition

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J Korean Inst Electr Electron Mater Eng 2006;19(6):501-506.
Published online: June 1, 2006
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Growth of Carbon Nanotubes by Microwave Plasma Enhanced Chemical Vapor Deposition
J Korean Inst Electr Electron Mater Eng. 2006;19(6):501-506.   Published online June 1, 2006
DOI: https://doi.org/10.4313/JKEM.2006.19.6.501
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Growth of Carbon Nanotubes by Microwave Plasma Enhanced Chemical Vapor Deposition
J Korean Inst Electr Electron Mater Eng. 2006;19(6):501-506.   Published online June 1, 2006
DOI: https://doi.org/10.4313/JKEM.2006.19.6.501
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