Electrical and Optical Properties of GZO Thin Films using Substrate Bias Voltage for Solar Cell

Soon Il Kwon; Seok Jin Lee; Seung Bum Park; Tae Hwan Jung; Dong Gun Lim; Jea Hwan Park; Won Seok Choi; Moon Gi Park; Kea Joon Yang

doi:10.4313/JKEM.2009.22.5.373

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기판 바이어스 전압을 이용한 태양전지용 GZO 박막의 전기적, 광학적 특성

권순일, 이석진, 박승범, 정태환, 임동건, 박재환, 최원석, 박문기, 양계준

Electrical and Optical Properties of GZO Thin Films using Substrate Bias Voltage for Solar Cell

Soon Il Kwon, Seok Jin Lee, Seung Bum Park, Tae Hwan Jung, Dong Gun Lim, Jea Hwan Park, Won Seok Choi, Moon Gi Park, Kea Joon Yang

J Korean Inst Electr Electron Mater Eng 2009;22(5):373-376.
Published online: May 1, 2009

DOI: https://doi.org/10.4313/JKEM.2009.22.5.373

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Keywords: RF magnetron sputtering, GZO films, Electrical and optical properties, DC bias voltage

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Electrical and Optical Properties of GZO Thin Films using Substrate Bias Voltage for Solar Cell

J Korean Inst Electr Electron Mater Eng. 2009;22(5):373-376. Published online May 1, 2009

DOI: https://doi.org/10.4313/JKEM.2009.22.5.373

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Electrical and Optical Properties of GZO Thin Films using Substrate Bias Voltage for Solar Cell

J Korean Inst Electr Electron Mater Eng. 2009;22(5):373-376. Published online May 1, 2009

DOI: https://doi.org/10.4313/JKEM.2009.22.5.373

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기판 바이어스 전압을 이용한 태양전지용 GZO 박막의 전기적, 광학적 특성

Electrical and Optical Properties of GZO Thin Films using Substrate Bias Voltage for Solar Cell

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