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밀도범함수를 이용한 정방정계-NiSi (010)/Si 계면 층의 구조 연구

김대희, 김대현, 서화일, 김영철

Structural Study of Interface Layers in Tetragonal-NiSi (010)/Si using Density Functional Theory

Dae Hee Kim, Dae Hyun Kim, Hwa Il Seo, Yeong Cheol Kim
J Electr Electron Mater 2009;22(5):377-381.
Published online: May 1, 2009
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Structural Study of Interface Layers in Tetragonal-NiSi (010)/Si using Density Functional Theory
J Electr Electron Mater. 2009;22(5):377-381.   Published online May 1, 2009
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Structural Study of Interface Layers in Tetragonal-NiSi (010)/Si using Density Functional Theory
J Electr Electron Mater. 2009;22(5):377-381.   Published online May 1, 2009
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