Study on Contact Resistance on the Performance of Oxide Thin Film Transistors

Jae Sang Lee; Sang Mo Koo; Sang Yeol Lee

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산화물 박막 트랜지스터 동작에 대한 접촉 저항의 영향

이재상, 구상모, 이상렬

Study on Contact Resistance on the Performance of Oxide Thin Film Transistors

Jae Sang Lee, Sang Mo Koo, Sang Yeol Lee

J Electr Electron Mater 2009;22(9):747-750.
Published online: September 1, 2009

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Keywords: ZrO2, a-IGZO, Thin film transistor

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Study on Contact Resistance on the Performance of Oxide Thin Film Transistors

J Electr Electron Mater. 2009;22(9):747-750. Published online September 1, 2009

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Study on Contact Resistance on the Performance of Oxide Thin Film Transistors

J Electr Electron Mater. 2009;22(9):747-750. Published online September 1, 2009

Articles

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산화물 박막 트랜지스터 동작에 대한 접촉 저항의 영향

Study on Contact Resistance on the Performance of Oxide Thin Film Transistors

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