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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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고온에서 제조된 실리콘 주입 p채널 다결정 실리콘 박막 트랜지스터의 전기 특성 변화 연구

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A Study on Electric Characteristics of Silicon Implanted p Channel Polycrystalline Silicon Thin Film Transistors Fabricated on High Temperature

Jin Min Lee
J Electr Electron Mater 2011;24(5):364-369.
Published online: May 1, 2011
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Analyzing electrical degradation of polycrystalline silicon transistor to applicable at several environment is very important issue. In this research, after fabricating p channel poly crystalline silicon TFT (thin film transistor) electrical characteristics were compare and analized that changed by gate bias with first measurement. As a result on and off current was reduced by variation of gate bias and especially re duce ratio of off current was reduced by 7.1×101. On/off current ratio, threshold voltage and electron mobility increased. Also, when channel length gets shorter on/off current ratio was increased more and thresh old voltage increased less. It was cause due to electron trap and de-trap to gate silicon oxide by variation of gate bias.

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A Study on Electric Characteristics of Silicon Implanted p Channel Polycrystalline Silicon Thin Film Transistors Fabricated on High Temperature
J Electr Electron Mater. 2011;24(5):364-369.   Published online May 1, 2011
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Include:
A Study on Electric Characteristics of Silicon Implanted p Channel Polycrystalline Silicon Thin Film Transistors Fabricated on High Temperature
J Electr Electron Mater. 2011;24(5):364-369.   Published online May 1, 2011
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