Skip to main navigation Skip to main content
  • KIEEME

J Electr Electron Mater : Journal of Electrical and Electronic Materials

OPEN ACCESS
ABOUT
BROWSE ARTICLES
EDITORIAL POLICIES
FOR CONTRIBUTORS

Articles

365 nm 파장대역 고투과율 실리콘 수지 TIR 렌즈 및 고지향성 노광기 광원모듈 제작

성준호, 유순재, 유순재, 정미숙

Fabrication of 365 nm Wavelength High Transmittance Silicone Resin TIR Lens and High Directivity Light Source Module for Exposure System

Jun Ho Sung, Soon Jae Yu, Kawan Anil, Mee Suk Jung
J Electr Electron Mater 2018;31(4):267-271.
Published online: May 1, 2018
  • 4 Views
  • 0 Download
  • 0 Crossref
  • 0 Scopus
prev

A high directivity TIR (total internal reflection) lens in the UV-A region was designed using a silicone resin, and a UV light source module with a maximum irradiation density of 150 mW/cm2 was fabricated. The beam angle of the TIR lens was designed to be 8.04° and the maximum diameter of the TIR lens was ø13.5. A silicone resin having a UV transmittance of 93% and a refractive index of 1.4 at a wavelength of 365 nm was used, and the lens was manufactured using an aluminum mold, from which silicone could be easily released. The module was fabricated in a metal printed circuit board of COB (chip on board) type using a 0.75×0.75 mm2 UV chip. A jig was used to adjust the focal length between lens and chip and to fix the position of the lens. The optical characteristics such as illumination distributions of the lens and module were designed using ‘LightTools’ optical simulation software. The heat dissipation system was designed to use a forced-air cooling method using a heat-sink and fan.

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

Include:

Fabrication of 365 nm Wavelength High Transmittance Silicone Resin TIR Lens and High Directivity Light Source Module for Exposure System
J Electr Electron Mater. 2018;31(4):267-271.   Published online May 1, 2018
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Fabrication of 365 nm Wavelength High Transmittance Silicone Resin TIR Lens and High Directivity Light Source Module for Exposure System
J Electr Electron Mater. 2018;31(4):267-271.   Published online May 1, 2018
Close