Electrical and Structural Properties of LiNbO3/Si Structure by RF Sputtering Method

Sang Woo Lee; Kwang Ho Kim; Won Jong Lee

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RF 스퍼터링법을 이용한 LiNbO3/Si 구조의 전기적 및 구조적 특성

이상우, 김광호, 이원종

Electrical and Structural Properties of LiNbO3/Si Structure by RF Sputtering Method

Sang Woo Lee, Kwang Ho Kim, Won Jong Lee

J Electr Electron Mater 1998;11(2):106-110.
Published online: February 1, 1998

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Electrical and Structural Properties of LiNbO3/Si Structure by RF Sputtering Method

J Electr Electron Mater. 1998;11(2):106-110. Published online February 1, 1998

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Electrical and Structural Properties of LiNbO3/Si Structure by RF Sputtering Method

J Electr Electron Mater. 1998;11(2):106-110. Published online February 1, 1998

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RF 스퍼터링법을 이용한 LiNbO3/Si 구조의 전기적 및 구조적 특성

Electrical and Structural Properties of LiNbO3/Si Structure by RF Sputtering Method

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