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RF sputtering 을 이용한 차세대 유전체 박막용 BaTiO3 세라믹스 박막의 제조 및 전기적 특성에 관한 연구

류기원, 이문기, 정장호, 이영희

A Study on the Electric Properties and Fabrication of BaTiO3 Ceramics Thin Film for the Next Generation Dielectric Thin Film by RF Sputtering

Ki Won Ryu, Moon Kee Lee, Jang Ho Chung, Young Hie Lee
J Electr Electron Mater 1999;12(3):254-262.
Published online: March 1, 1999
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A Study on the Electric Properties and Fabrication of BaTiO3 Ceramics Thin Film for the Next Generation Dielectric Thin Film by RF Sputtering
J Electr Electron Mater. 1999;12(3):254-262.   Published online March 1, 1999
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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A Study on the Electric Properties and Fabrication of BaTiO3 Ceramics Thin Film for the Next Generation Dielectric Thin Film by RF Sputtering
J Electr Electron Mater. 1999;12(3):254-262.   Published online March 1, 1999
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