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센서 기능성 박막 / RF 마그네트론 스퍼터링으로 증착한 AIN 박막의 구조적 특성과 전기적 특성

김경석, 황영한, 김희대, 남창우, 이규철

Structural and Electrical Characteristics of AIN Thin Film using RF Magnetron Sputtering

Kyeng Suk Kim, Yeong Han Hwang, Hee Dai Kim, Chang Woo Nam, Gyu Chul Lee
J Electr Electron Mater 1999;12(10):887-895.
Published online: October 1, 1999
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Structural and Electrical Characteristics of AIN Thin Film using RF Magnetron Sputtering
J Electr Electron Mater. 1999;12(10):887-895.   Published online October 1, 1999
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Structural and Electrical Characteristics of AIN Thin Film using RF Magnetron Sputtering
J Electr Electron Mater. 1999;12(10):887-895.   Published online October 1, 1999
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