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"Nano CMOSFET"

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"Nano CMOSFET"

Dependency of the Device Characteristics on Plasma Nitrided Oxide for Nano-scale PMOSFET
J Electr Electron Mater 2007;20(7):569-574.   Published online July 1, 2007
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A Stacked Polusilicon Strucutre by Nitridation in N2 Atmosphere for Nano-scale CMOSFETs
J Electr Electron Mater 2005;18(11):1001-1006.   Published online November 1, 2005
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