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"Nano CMOSFET"

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"Nano CMOSFET"

Dependency of the Device Characteristics on Plasma Nitrided Oxide for Nano-scale PMOSFET
J Korean Inst Electr Electron Mater Eng 2007;20(7):569-574.   Published online July 1, 2007
DOI: https://doi.org/10.4313/JKEM.2007.20.7.569
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Dependence of Low-frequency Noise and Device Characteristics on Initial Oxidation Method of Plasma-nitride Oxide for Nano-scale CMOSFET
J Korean Inst Electr Electron Mater Eng 2007;20(1):1-7.   Published online January 1, 2007
DOI: https://doi.org/10.4313/JKEM.2007.20.1.001
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A Stacked Polusilicon Strucutre by Nitridation in N2 Atmosphere for Nano-scale CMOSFETs
J Korean Inst Electr Electron Mater Eng 2005;18(11):1001-1006.   Published online November 1, 2005
DOI: https://doi.org/10.4313/JKEM.2005.18.11.1001
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