Skip to main navigation Skip to main content
  • KIEEME

J Electr Electron Mater : Journal of Electrical and Electronic Materials

OPEN ACCESS
Search
Advanced Search
ABOUT
BROWSE ARTICLES
EDITORIAL POLICIES
FOR CONTRIBUTORS

Page Path

5
results for

"Nano-scale"

Keywords

More +

Publication year

Authors

"Nano-scale"

Improving the Thermal Stability of Ni-silicide using Ni-V on Boron Cluster Implanted Source/drain for Nano-scale CMOSFETs
J Korean Inst Electr Electron Mater Eng 2007;20(6):487-490.   Published online June 1, 2007
DOI: https://doi.org/10.4313/JKEM.2007.20.6.487
  • 68 View
  • 0 Download
Fabrication of SOI FinFET Devices using Arsenic Solid-phase-diffusion
Won Ju Cho, Hyun Mo Koo, Woo Hyun Lee, Sang Mo Koo, Hong Bay Chung
J Korean Inst Electr Electron Mater Eng 2007;20(5):394-398.   Published online May 1, 2007
DOI: https://doi.org/10.4313/JKEM.2007.20.5.394
  • 76 View
  • 0 Download
Thermal Stability Improvement of Ni-Silicide on the SOI Substrate Doped B11 for Nano-scale CMOSFET
J Korean Inst Electr Electron Mater Eng 2006;19(11):1000-1004.   Published online November 1, 2006
DOI: https://doi.org/10.4313/JKEM.2006.19.11.1000
  • 80 View
  • 0 Download
Fabrication and Characterization of 32×32 Silicon Cantilever Array using MEMS Process
J Korean Inst Electr Electron Mater Eng 2006;19(10):894-900.   Published online October 1, 2006
DOI: https://doi.org/10.4313/JKEM.2006.19.10.894
  • 69 View
  • 0 Download
Fabrication and Characterization of Thermal Probe Array on SOI Substrates
J Korean Inst Electr Electron Mater Eng 2005;18(11):990-995.   Published online November 1, 2005
DOI: https://doi.org/10.4313/JKEM.2005.18.11.990
  • 67 View
  • 0 Download
First First Prev Prev
Page of 1
Next Next Last Last