Characteristics of Friction Affecting CMP Results

doi:10.4313/JKEM.2004.17.10.1041

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CMP 결과에 영향을 미치는 마찰 특성에 관한 연구

박범영, 이현섭, 김형재, 서헌덕, 김구연, 정해도

Characteristics of Friction Affecting CMP Results

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J Korean Inst Electr Electron Mater Eng 2004;17(10):1041-1048.
Published online: October 1, 2004

DOI: https://doi.org/10.4313/JKEM.2004.17.10.1041

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Characteristics of Friction Affecting CMP Results

J Korean Inst Electr Electron Mater Eng. 2004;17(10):1041-1048. Published online October 1, 2004

DOI: https://doi.org/10.4313/JKEM.2004.17.10.1041

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Characteristics of Friction Affecting CMP Results

J Korean Inst Electr Electron Mater Eng. 2004;17(10):1041-1048. Published online October 1, 2004

DOI: https://doi.org/10.4313/JKEM.2004.17.10.1041

Articles

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CMP 결과에 영향을 미치는 마찰 특성에 관한 연구

Characteristics of Friction Affecting CMP Results

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