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고온 전자빔 증착에 의한 Ethylene Terephthalate상의 SiOx 박막의 특성 평가

한진우, 김영환, 김종환, 서대식, 문대규

Characteristics of Defects in SiOx Thin Films on Ethylene Terephthalate by High-temperature E-beam Deposition

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J Korean Inst Electr Electron Mater Eng 2006;19(1):71-74.
Published online: January 1, 2006
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Characteristics of Defects in SiOx Thin Films on Ethylene Terephthalate by High-temperature E-beam Deposition
J Korean Inst Electr Electron Mater Eng. 2006;19(1):71-74.   Published online January 1, 2006
DOI: https://doi.org/10.4313/JKEM.2006.19.1.071
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
Format:
Include:
Characteristics of Defects in SiOx Thin Films on Ethylene Terephthalate by High-temperature E-beam Deposition
J Korean Inst Electr Electron Mater Eng. 2006;19(1):71-74.   Published online January 1, 2006
DOI: https://doi.org/10.4313/JKEM.2006.19.1.071
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