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RF Power에 따른 Amorphous-InGaZnO 박막의 특성 변화

김상훈, 박용헌, 김홍배

The Characteristic Changes of Amorphous-InGaZnO Thin Film according to RF Power

Sang Hun Kim, Yong Heon Park, Hong Bae Kim
J Electr Electron Mater 2010;23(4):293-297.
Published online: April 1, 2010
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The Characteristic Changes of Amorphous-InGaZnO Thin Film according to RF Power
J Electr Electron Mater. 2010;23(4):293-297.   Published online April 1, 2010
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
The Characteristic Changes of Amorphous-InGaZnO Thin Film according to RF Power
J Electr Electron Mater. 2010;23(4):293-297.   Published online April 1, 2010
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