A linear piezoelectric actuator that utilizes the elliptical motion of the two tips of the actuator is proposed. This device is easy to fabricate owing to its simple structure, consisting of three piezo ceramic benders and is suitable for use in micro robotic applications. A π-shaped structure, which was composed of four piezo ceramic benders, was constructed. Two of the benders were positioned on the center of the actuator, and the joints were attached at the ends of the cantilever. The other two benders were positioned on the side of the actuator and were attached between the joint and the tips. The actuator structure was designed to obtain the first bending mode of the horizontal vibration and the vertical vibration at the same frequency, resulting in elliptical motions at the tips. When two sinusoidal wave voltages with a 90-degree phase difference were applied to the two pairs of the actuator benders, elliptical motions were obtained at the tips. The driving characteristics of the prototype actuator were then measured using a laser doppler vibrometer.
